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工艺气体导入的均匀性或均匀度的可控性是显示面板行业的重要研究课题之一，直接影响基板的镀膜质量。基于流体在圆管中流动的运动学规律，分析了二分法导致多出口流量不均匀性的影响因素，提出了基于逆旋转二分法的结构设计方法并据此设计了棒状结构导管和环状结构导管，采用增材制造技术制备了该两种结构导管并进行了均匀性实验，通过无因次分析方法分析了实验数据的流量均匀性规律。研究结果表明：转弯流道是影响二分流均匀性的主要原因；经过n级分流后单流道被分成2n个流道出口，出口前设置蓄积腔能明显提高流量均匀性。通过流体运动学仿真与实验数据的对比研究，验证了该结构设计方法的有效性和优越性，为气体均匀供给装置的均匀性分流设计提供了参考。
Abstract：Controllability of uniformity or homogeneity of process gas introduction is one of the important research topics in the display panel industry, affecting the quality of substrate coating directly. Based on the kinematic laws of fluid flow in a circular tube, the influencing factors of flow non-uniformity caused by dichotomy at multiple outlets are analyzed, and a structural design method is proposed for rod-shaped and ring-shaped conduits based on the inverse rotation dichotomy. The rod-shaped and ring-shaped conduits are fabricated using additive manufacturing technology and subjected to uniformity experiments, and the flow uniformity of experimental data is analyzed using the dimensionless analysis method. The research results indicate that turning channels are the main reason affecting the uniformity of dichotomy; after n-stage dichotomy, the single flow channel is divided into 2n, and the installation of an accumulation chamber before the outlets can significantly improve the flow uniformity.Through comparative studies of fluid kinematic simulations and experimental data, the effectiveness and superiority of the structural design method were verified, providing a reference for the uniformity shunt design of gas uniform supply devices.
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基本信息:
DOI：10.13922/j.cnki.cjvst.202509002
中图分类号:TN873;O35
引用信息:
[1]邬全兵,杨一新,张超毅,等.气体均匀供给装置的仿真设计与实验研究[J].真空科学与技术学报,2026,46(02):161-167.DOI:10.13922/j.cnki.cjvst.202509002.
基金信息:
广东省重点领域研发计划项目（CC/XM-202401ZJ0201）
2025-12-11
2025-12-11
2025-12-11