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环境模拟装置的真空度控制过程中广泛应用真空泵以及真空蝶阀，而针对在稳压过程中变频真空泵的适应性以及蝶阀与管道耦合后对气体的节流特性研究较少，因此本文设计了一种应用变频真空泵及蝶阀的稳压控制系统，利用CFD方法计算不同流态下维持压力稳定所需质量流量并评估稳压质量流量对真空泵运行的影响，进一步探究了两种典型小口径蝶阀与管道耦合的流量特性及控制精度大小。结果表明：在250 s内稳压1×104 Pa以及5×103 Pa满足0.5%的控制精度，稳压1×103 Pa满足0.2%的控制精度，在使用小口径蝶阀时应当在前端安装质量流量控制器以满足变频真空泵的需求，讨论了两种蝶阀耦合管道后的流量特性及控制精度的优劣，明确了不同稳压段蝶阀有效开度范围、节流特性以及控制精度的关联性，为环境模拟装置中变频真空泵及蝶阀的选型提供了理论支持以及技术参考。
Abstract：Vacuum pumps and vacuum butterfly valves are widely used in the vacuum control process of environmental simulation devices. However, limited research has been conducted on the adaptability of variablefrequency vacuum pumps during pressure stabilization and the throttling characteristics of butterfly valves coupled with pipelines. To address this, this study designed a stabilization control system utilizing both components.Computational Fluid Dynamics(CFD) was employed to calculate the mass flow rate required for maintaining pressure stability across different flow regimes and to assess the impact of this stabilized flow on vacuum pump operation. Furthermore, the flow rate characteristics and control accuracy of two typical small-diameter butterfly valves integrated with pipelines were investigated. Results demonstrated that pressure stabilization at 1×104 Pa and5×103 Pa was achieved within 250 seconds with 0.5% control accuracy, and 1×103 Pa with 0.2% accuracy. Upstream mass flow controllers are essential for small-diameter valves to meet variable-frequency vacuum pump demand variations. Comparative analysis clarified the flow characteristic and control accuracy advantages of the two valve types after pipeline coupling, establishing correlations between effective opening ranges, throttling behaviors, and control precision across pressure stabilization segments, and the selection of variable-frequency vacuum pumps and butterfly valve configurations in environmental simulation equipment provides theoretical support and technical reference.
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基本信息:
DOI：10.13922/j.cnki.cjvst.202507013
中图分类号:TB752
引用信息:
[1]李恒霖,王郅轩,张世恒,等.环模装置不同流态下气体流量精准节流特性研究[J].真空科学与技术学报,2026,46(03):247-255.DOI:10.13922/j.cnki.cjvst.202507013.
2025-10-22
2025-10-22
2025-10-22