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阿里原初引力波望远镜（Ali CMB polarization telescope,AliCPT）是中国第一台也是北半球唯一一台研究原初引力波的大科学装置。为实现其万量级低温超导探测器阵列的批量制备，工艺稳定性尤为关键，其中，铌（Nb）超导薄膜的沉积与刻蚀质量直接决定器件的最终性能。前期研究发现在特定条件下Nb超导薄膜刻蚀后会出现“残影现象”，严重影响了工艺稳定性和器件质量。为研究刻蚀残影形成机理，文章综合运用表面形貌表征、元素成分分析和表面化学状态分析等方法，发现刻蚀区内存在厚度非均匀的光刻胶残留，残留的光刻胶在刻蚀过程中会引发碳氟钝化层厚度差异，进而导致区域内刻蚀程度不同，形成残影现象。文章通过优化清洗工艺和刻蚀工艺，有效抑制了残影缺陷，为低温超导探测器的大规模批量制备提供了技术支撑，同时对颗粒物沉积等共性工艺问题的解决也具有参考价值。
Abstract：The Ali CMB Polarization Telescope(AliCPT) is China's first and the only facility in the Northern Hemisphere dedicated to studying primordial gravitational waves. To achieve mass production of its tens-ofthousands-scale low-temperature superconducting detector array, process stability is particularly critical, where the quality of niobium(Nb) superconducting thin film deposition and etching directly determines the final device performance. Early studies found that under specific conditions, ghost patterns appear on niobium superconducting thin films after etching, severely affecting process stability and device quality. To investigate this mechanism, this paper comprehensively utilized methods including surface topography characterization, elemental composition analysis, and surface chemical state analysis, confirming the presence of photoresist residue with non-uniform thickness within the etched regions. The residual photoresist induced thickness variations in the carbon-fluorine passivation layer during the etching process, leading to mismatched etching rates across the region and ultimately forming the ghost patterns. By optimizing both the cleaning process and etching recipe, this study successfully suppressed ghost-pattern defects, laying the foundation for large-scale mass production of low-temperature superconducting detectors, it also provides a valuable reference for addressing common process issues such as particulate deposition.
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基本信息:
DOI：10.13922/j.cnki.cjvst.202507018
中图分类号:TB383.2;TH743
引用信息:
[1]王朋阳,陈国强,修青磊,等.铌超导薄膜刻蚀残影机理研究及工艺优化[J].真空科学与技术学报,2026,46(03):277-284.DOI:10.13922/j.cnki.cjvst.202507018.
基金信息:
国家重点研发计划项目（2023YFC2206500）; 国家自然科学基金项目（12227810）; 广东省高精度射线探测技术重点实验室项目（2024B1212010005）; 广东省基础与应用基础研究基金项目（2024B1515120015）
2025-11-04
2025-11-04
2025-11-04