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随着半导体等领域对真空环境洁净度要求的提高，干式螺杆真空泵凭其无油、高抽速、节能等特性被广泛应用。通过数值模型实现对螺杆真空泵的抽气性能预测，是其研发设计的关键。已有螺杆真空泵抽速性能预测的腔室模型，不能正确给出气体在泵内输运过程的压强连续变化曲线。为此，文章提出了一种新的“动态腔室模型”，用于螺杆真空泵的抽气性能预测研究。通过与实验抽速曲线的对比，验证了提出的新模型能够更精确地预测螺杆真空泵的抽速性能:在趋近泵极限真空度、入口压强为5.8 Pa时，“动态腔室模型”的预测抽速为40.18 m3/h，与实测抽速差异率为31.5%，而已有腔室模型的预测抽速为41.63 m3/h，与实测抽速差异率为63.2%。并且“动态腔室模型”可以给出连续的螺杆转子腔室压强变化曲线，从而能够反映螺杆真空泵整个工作周期的气体输运状态。
Abstract：With the improvement of the cleanliness requirement of vacuum environment in semiconductor and other fields, dry twin-screw vacuum pumps are widely used due to their oil-free and high ultimate vacuum characteristics. The theoretical prediction of the pumping performance of screw vacuum pumps is realized through numerical modeling, which is the key to the research and design of screw vacuum pumps. The existing chamber model for pumping performance prediction of screw vacuum pumps has the problem of not being able to obtain the continuous pressure change curve. In this paper, a new “dynamic chamber model” is proposed for the pumping speed prediction of screw vacuum pumps. By comparing with the experimental pumping speed curves, it is verified that the new model proposed in this paper can predict the pumping speed performance of the screw vacuum pump more accurately, Verified against experimental data, it predicts more accurately: at 5.8 Pa(near ultimate vacuum),its 40.18 m3/h pumping speed shows a 31.5% deviation from measurements, versus the existing model's 41.63 m3/h with a 63.2% deviation. Additionally, it generates continuous pressure curves for the rotor chamber, reflecting gas transport throughout the full working cycle.
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基本信息:
DOI：10.13922/j.cnki.cjvst.202507010
中图分类号:TB752
引用信息:
[1]吴俊,朱文明,何海斌,等.螺杆真空泵抽气性能预测模型与分析方法研究[J].真空科学与技术学报,2026,46(02):101-109.DOI:10.13922/j.cnki.cjvst.202507010.
2025-09-12
2025-09-12
2025-09-12