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当熔石英光学元件表面存在缺陷时，该缺陷将对入射光场产生调制作用，使得熔石英内部光场分布呈现非均匀性，局部区域光强显著增强。为了探究光学元件的激光场致损伤机制，本研究基于时域有限差分法，构建了含划痕缺陷的熔石英光学元件损伤分析模型。通过分析划痕数量、划痕几何参数及划痕间距对光场分布与损伤特性的影响规律，探究划痕数量、划痕几何参数及划痕间距对熔石英抗激光损伤能力的影响。研究结果表明：入射光场参数条件一定时，随划痕数量增加，其对光场的调制效应增强，熔石英抗激光损伤能力降低；对于单条划痕，减小宽深比会降低熔石英损伤阈值，意味着抗激光损伤能力减弱；多划痕随间距增长，光强增强效应先升后降，对应的损伤阈值先减后增，其最小值位于划痕间距为9μm时，即此时熔石英抗激光损伤能力最弱。
Abstract：When surface defects are present on fused silica optical components, they modulate the incident laser field, resulting in a non-uniform internal light distribution with local intensity enhancement. To investigate the laser-field-induced damage mechanisms of optical components, in this study, a finite-difference time-domain(FDTD) model is developed to investigate laser-field-induced damage in fused silica containing surface scratches.By analyzing how the number of scratches, their geometric parameters, and their spacing affect the light-field distribution and damage characteristics, the influence of these factors on the laser-damage resistance of fused silica is investigated. The results indicate that, under fixed incident conditions, increasing the number of scratches enhances light-field modulation and reduces the damage resistance of fused silica. For a single scratch, a smaller width-to-depth ratio leads to a lower damage threshold. With increasing scratch spacing, the light-intensity enhancement first increases and then decreases, while the damage threshold shows the opposite trend, reaching a minimum at a spacing of 9 μm, where fused silica exhibits the weakest laser-damage resistance.
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基本信息:
DOI：10.13922/j.cnki.cjvst.202509026
中图分类号:TH74
引用信息:
[1]卢昱坤,苏俊宏.表面多划痕对熔石英抗激光损伤性能的影响研究[J].真空科学与技术学报,2026,46(03):256-268.DOI:10.13922/j.cnki.cjvst.202509026.
基金信息:
国家自然科学基金项目(62205263); JKW创新项目(G20220622)
2026-01-08
2026-01-08
2026-01-08